Spectral ellipsometry and its application

February 13, 2015 (Friday)
Hall 300, Institute of Solid State Physics – BAS

Programme

Opening : academician A.G. Petrov (INERA project coordinator, ISSP-BAS)

11:00 – 11:40 Dr. H. Stroescu (Institute of Physical Chemistry, Romania ):
“M2000 D Ellipsometer – measurements and data modelling”

11:40 – 12:20 Dr. St. Russev (Sofia University):
“The inverse ellipsometric problem:ellipsometry on liquid interfaces”

12:20 – 13:00 Dr. A. Szekeres (ISSP-BAS):
“Ellipsometric characterization of nanoscaled SiO x N y layers grown
in plasma-immersion N+ ion implanted silicon”